INDEX UNIT
 
Controller which controls each unit of power, speed, location and etc.
EFEM UNIT
 
To supply wafer in cartridge to the applicable equipment.
ETU UNIT
 
To spread the fluid on wafer and to keep wafer not to dry.
UDR-ARM
 
to carry the wafer cartridge in semiconductor fabrication line.
Wafer cartridge transfer robot
 
to carry the wafer cartridge in semiconductor fabrication line.
UP-DOWN ROBOT FOR WAFER
 
To carry the wafers between main robots; upper and lower.
K-8 0TA
 
k-8 0TA is to supply each wafer to 4 cleaning equipments.
Cassette upper rack
 
an equipment which carries and stays wafer cartridges for the next step.
K-SPIN
 
to supply wafer, rotating and moving up/down.
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